How to Measure the Arc Pressure
Two pressure transducers are used to
monitor the gas pressure in the arc chamber.
The SX series of piezo resistive pressure
sensor functions as a wheatstone bridge on a
silicon chip with a response times of 0.1 ms.
The pressure transducer gives a voltage output directly proportional to the applied
pressure with sensitivity 0.75 mV/Psi. Long
term stability is 0.1% and repeatability is
0.5% (Maximum difference in output at any
pressure with the operating pressure range
and temperature within O °C to +70 °C).
Resistors are ion implanted into the silicon.
The cavity etched on the reverse to create a
thin silicon diaphragm.
No comments:
Post a Comment